Skip to main content

Different Techniques

Characterization MethodInformation Obtained
Scanning Electron Microscopy (SEM)Morphology up to 1 nm resolution, elemental mapping down to a few µm thick
Nano X-ray Tomography (CT)Morphology of defects or phases based on X-ray density differences (non-destructive)
Focus Ion Beam (FIB)Site specific sample preparation for SEM and TEM, crystal orientation
Transmission Electron Microscopy (TEM)Morphology and elemental mapping up to atomic scale resolution
X-ray Diffraction (XRD)Crystal structure, material identification, phase diagram of solids and thin films
X-ray Photoelectron Spectroscopy (XPS)Elemental concentration, chemical state and bonding from 2-3 nm uppermost surface of solid materials
Time-of-Flight Secondary Ion Mass Spectrometry (ToF SIMS)Elemental and molecular mass spectra and chemical mapping from 2-3 nm uppermost surface; elemental depth profile down to a few µm of solid materials
Confocal Raman Spectroscopy (SEM)Fingerprint of chemical information, functional groups, 3D chemical mapping of solids and liquids
NanoindentationMechanical properties of coatings, thin films, spatial dependence of hardness and elastic modulus.
Confocal Laser Scanning MicroscopySurface roughness of solids; high resolution 3D optical images