Scios Dual Beam Focused Ion Beam
The Scios is a Ga Liquid Metal Ion Source (LMIS) instrument for TEM sample prep, patterning, and SEM cross sectioning of samples. This is an ultra-high-resolution analytical focused ion beam scanning electron microscopy (FIB-SEM) system that provides outstanding sample preparation and 3D characterization performance for a wide range of samples, including magnetic and non-conductive materials.
Questions? Contact Roberto Garcia at rgarcia@ncsu.edu.
Location: MRC 119
Equipment Specifications
Electron Beam
- Schottky field emission gun
- 1.6nm resolution at 1keV
- 7 mm Eucentric Working Distance
Ion Optics
- 30kV Max accelerating voltage
- 1.65 pA – 65nA beam current
- 3.0 nm resolution at 30kV
Detectors
- Everhart-Thornley (ET) detector
- In-lens detector
- Ion conversion and electron (ICE) detector
- Retractable Backscatter detector
- Nav-Cam navigation
Gas Injection
- Platinum
- Carbon