Scios Dual Beam Focused Ion Beam

The Scios is a Ga Liquid Metal Ion Source (LMIS) instrument for TEM sample prep, patterning, and SEM cross sectioning of samples. This is an ultra-high-resolution analytical focused ion beam scanning electron microscopy (FIB-SEM) system that provides outstanding sample preparation and 3D characterization performance for a wide range of samples, including magnetic and non-conductive materials. 

Questions? Contact Roberto Garcia at rgarcia@ncsu.edu
Location: MRC 119

Equipment Specifications

Electron Beam

  • Schottky field emission gun
  • 1.6nm resolution at 1keV
  • 7 mm Eucentric Working Distance

Ion Optics

  • 30kV Max accelerating voltage
  • 1.65 pA – 65nA beam current
  • 3.0 nm resolution at 30kV

Detectors

  • Everhart-Thornley (ET) detector
  • In-lens detector
  • Ion conversion and electron (ICE) detector
  • Retractable Backscatter detector
  • Nav-Cam navigation

Gas Injection

  • Platinum
  • Carbon