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Analytical Instrumentation Facility

Field Emission Scanning Electron Microscope – Hitachi SU8700

The Hitachi SU8700 field-emission scanning electron microscope (FESEM) is an ultra-high resolution Schottkey emitter SEM.

Location: MRC room 118

Through clever lens design, the SU8700 allows for ultra-high resolution imaging at low energy on insulating samples with no conductive coating. The SU8700 is equipped with a wide array of low and high energy electron detectors including an energy dispersive X-ray spectrometer.

Equipment Specifications

  • Everhart-Thornley secondary electron detector (UD)
  • Upper secondary electron detector (UD)
  • In lens backscattered electron detector (MD)
  • Insertable backscattered electron detector (CBS)
  • Oxford energy dispersive X-ray spectometer (EDS)
  • Oxford Symmetry EBSD detector
  • Eucentric tilt -5° to +65º
  • Rotate 360º
  • x = -25 to +25 mm
  • y = -25 to +25 mm
  • z = 1.5 – 40 mm
  • Electron Landing Energy
    • 10eV – 30 keV
  • Magnification
    • 10X – 2MX
  • Resolution (SE)
    • 0.8 nm @ 15 kV
  • Working Distance
    • 1.5-45 mm focusable, beam energy dependent

Documentation