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Zeiss Xradia 510 Versa 3D X-ray Tomography System

The ZEISS Xradia 510 Versa X-ray microscopes (XRM) is a high-resolution 3D X-ray imaging system for non-destructive analysis.

Location: EBI room 1053

The ZEISS Xradia 510 Versa X-ray microscopes (XRM) is a high-resolution 3D X-ray imaging system for non-destructive analysis. Xradia 510 allows submicron imaging of samples from mm to inches with weight up to 15 kg and sample size up to 300 mm. Specifically, the resolution of the system achieves < 0.7 μm true spatial resolution with minimum achievable voxel size < 70 nm of samples. The high resolution and contrast with flexible working distances provides excellent non-destructive imaging performance.

Equipment Specifications

X-ray source30-160kV, 10W maximum power, 12 filters for energy selection
X-ray detector
Dual-stage detector system with 2k x 2k pixel. The detector turret of multiple objectives (0.4X, 4X, 20X) at different magnifications with optimized scintillators for highest contrast
Spatial resolution
< 0.7 µm true spatial resolution and below 70 nm voxel size
Sample size limitsUp to 300 mm, 15 kg
ReconstructionXMReconstructor
Analysis softwareDragonfly Pro
Radiation safety<1 µSv/h at 10cm from the instrument surface